ĭevice simulation tools have the capability to simulate the electrical, thermal, and optical properties and performance of devices. Commercial tools include Synopsys Sentaurus Sentaurus Process and Silvaco Athena. These tools allow process engineers to fine tune their recipe and to analyze the effect of each process step and condition on the resulting device structure. They typically make use of a scripting language and require knowledge of a process recipe. The process simulation tools allow for the virtual fabrication of devices and the emulation of fabrication steps and conditions. These tools allow device designers to parameterize device aspects and features to optimize their design or to assess the performance dependence on the parameters of question. Commercial tools include Synopsys Sentaurus Structure Editor and SilvacoDevEdit™. At this stage, the device geometry, the material and doping profile, and concentration of regions is defined. The device design tool allows the rapid creation of device structures via the use of scripting language or a graphical user interface without the need to know the process recipe. Exemplary combination of tools making up a typical TCAD suite framework.
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